Silicon nanopillar anodes for lithium-ion batteries using nanoimprint lithography with flexible molds

Abstract

Articles you may be interested in In situ cycling and mechanical testing of silicon nanowire anodes for lithium-ion battery applications Appl. Fabrication of silicon template with smooth tapered sidewall for nanoimprint lithography High aspect ratio fine pattern transfer using a novel mold by nanoimprint lithography Sub-200 nm gap electrodes by soft UV nanoimprint lithography using polydimethylsiloxane mold without external pressure J.

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